APA-Zitierstil (7. Ausg.)
Liu, S., Tang, Y., Cheng, X., Long, Y., Jiang, J., He, Y., & Zhao, L. (2025). Using Higher Diffraction Orders to Improve the Accuracy and Robustness of Overlay Measurements. Micromachines. https://doi.org/10.3390/mi16030347
Chicago-Zitierstil (17. Ausg.)
Liu, Shaoyu, Yan Tang, Xiaolong Cheng, Yuliang Long, Jinfeng Jiang, Yu He, und Lixin Zhao. "Using Higher Diffraction Orders to Improve the Accuracy and Robustness of Overlay Measurements." Micromachines 2025. https://doi.org/10.3390/mi16030347.
MLA-Zitierstil (9. Ausg.)
Liu, Shaoyu, et al. "Using Higher Diffraction Orders to Improve the Accuracy and Robustness of Overlay Measurements." Micromachines, 2025, https://doi.org/10.3390/mi16030347.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.