Kaariainen, T. (2013). Atomic layer deposition: Principles, characteristics, and nanotechnology applications (2nd ed.). John Wiley & Sons.
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Chicago Style (17th ed.) Citation
Kaariainen, Tommi. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. 2nd ed. Hoboken, NJ: John Wiley & Sons, 2013.
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MLA (9th ed.) Citation
Kaariainen, Tommi. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. 2nd ed. John Wiley & Sons, 2013.
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Warning: These citations may not always be 100% accurate.