Journal of microelectromechanical systems: A joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems [J Microelectromech Syst] NLMUID: 101149765.
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Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems [J Microelectromech Syst] NLMUID: 101149765.
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Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems [J Microelectromech Syst] NLMUID: 101149765.
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