Journal of vacuum science & technology. B, Microelectronics and nanometer structures: Processing, measurement, and phenomena: an official journal of... [J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom] NLMUID: 101491911.
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Chicago Style (17th ed.) Citation
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena: An Official Journal of... [J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom] NLMUID: 101491911.
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MLA (9th ed.) Citation
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena: An Official Journal of... [J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom] NLMUID: 101491911.
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Warning: These citations may not always be 100% accurate.