Journal of micro/nanolithography, MEMS, and MOEMS: JM3 [J Micro Nanolithogr MEMS MOEMS] NLMUID: 101558516.
Chicago Style (17th ed.) CitationJournal of Micro/nanolithography, MEMS, and MOEMS: JM3 [J Micro Nanolithogr MEMS MOEMS] NLMUID: 101558516.
MLA (9th ed.) CitationJournal of Micro/nanolithography, MEMS, and MOEMS: JM3 [J Micro Nanolithogr MEMS MOEMS] NLMUID: 101558516.
Warning: These citations may not always be 100% accurate.