Journal of micro/nanolithography, MEMS, and MOEMS: JM3 [J Micro Nanolithogr MEMS MOEMS] NLMUID: 101558516.
Cita Chicago Style (17a ed.)Journal of Micro/nanolithography, MEMS, and MOEMS: JM3 [J Micro Nanolithogr MEMS MOEMS] NLMUID: 101558516.
Cita MLA (9a ed.)Journal of Micro/nanolithography, MEMS, and MOEMS: JM3 [J Micro Nanolithogr MEMS MOEMS] NLMUID: 101558516.
Precaución: Estas citas no son 100% exactas.