Society of Photo-optical Instrumentation Engineers. (2007). Journal of micro/nanolithography, MEMS, and MOEMS: JM3. SPIE-The International Society for Optical Engineering.
Cita Chicago Style (17a ed.)Society of Photo-optical Instrumentation Engineers. Journal of Micro/nanolithography, MEMS, and MOEMS: JM3. Bellingham, WA: SPIE-The International Society for Optical Engineering, 2007.
Cita MLA (9a ed.)Society of Photo-optical Instrumentation Engineers. Journal of Micro/nanolithography, MEMS, and MOEMS: JM3. SPIE-The International Society for Optical Engineering, 2007.
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