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The Journal of Microlithography, Microfabrication, and Microsystems
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Lignende værker: The Journal of Microlithography, Microfabrication, and Microsystems
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Microsystems & nanoengineering [Microsyst Nanoeng] NLMUID: 101695458
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Journal of microelectromechanical systems: a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems [J Microelectromech Syst] NLMUID: 101149765
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Digest of technical papers / International Conference on Solid-State Sensors, Actuators and Microsystems [Dig Tech Papers] NLMUID: 101525070
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International Solid-State Sensors, Actuators and Microsystems Conference: [proceedings] [Int Solid State Sens Actuators Microsyst Conf] NLMUID: 101711149
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Fundamental principles of optical lithography : the science of microfabrication /
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The Journal [Journal] NLMUID: 101082650
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