A flexible high-precision capacitive displacement sensor

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Publicado en:Journal of Physics: Conference Series vol. 3019, no. 1 (May 2025), p. 012068
Autor principal: Xu, Xiaohu
Otros Autores: Fan, Xingchen, Yu, Zhicheng, Teng, Wenhao, Chen, Jiaxing
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IOP Publishing
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022 |a 1742-6588 
022 |a 1742-6596 
024 7 |a 10.1088/1742-6596/3019/1/012068  |2 doi 
035 |a 3216358113 
045 2 |b d20250501  |b d20250531 
100 1 |a Xu, Xiaohu  |u School of Mechanical Engineering, Beijing Institute of Technology , Beijing 100081, China 
245 1 |a A flexible high-precision capacitive displacement sensor 
260 |b IOP Publishing  |c May 2025 
513 |a Journal Article 
520 3 |a In flexible conveyor systems and measurement systems where linear and angular displacements are used in combination, the use of multiple linear and angular displacement sensors for displacement measurement increases the complexity of the system and poses a great challenge to system design and accurate positioning. In this paper, a flexible high-precision capacitive displacement sensor is proposed, which can be applied to both linear and angular displacement measurements. The sensor consists of a dynamic ruler with excitation electrodes and a fixed ruler with sensing electrodes. The excitation and sensing electrodes are printed on an insulated flexible substrate using a flexible printed circuit process. This design provides good ductility, small size, and excellent electrical performance. It enables the conversion between straight-line and cylindrical forms for linear and angular displacement measurement. In this paper, the mathematical measurement model and electric field simulation model of two different measurement forms of the sensor are established, and the measurement performance of the sensor in linear and cylindrical forms is verified through experiments. The results show that the measurement error is ±6μm in the linear displacement measurement range of 0∼312mm and ±17.5″ in the angular displacement measurement range of 0∼360°. With the characteristics of flexible and extensible, small volume and thin thickness, the sensor proposes a new application technology for the complex problem of using multiple sensors for positioning and measuring in the combined path positioning measurement of high-precision and complex conveyor systems. 
653 |a Systems design 
653 |a Excitation 
653 |a Displacement measurement 
653 |a Electric fields 
653 |a Multisensor applications 
653 |a Electrodes 
653 |a Complexity 
653 |a Sensors 
653 |a Simulation models 
653 |a Conveyors 
700 1 |a Fan, Xingchen  |u Engineering Research Center of Mechanical Testing Technology and Equipment (Ministry of Education), Chongqing University of Technology , Chongqing 400054, China; GENERTEC Guoce Time Grating Technology Co., Ltd. , Chongqing 401329, China 
700 1 |a Yu, Zhicheng  |u Engineering Research Center of Mechanical Testing Technology and Equipment (Ministry of Education), Chongqing University of Technology , Chongqing 400054, China; GENERTEC Guoce Time Grating Technology Co., Ltd. , Chongqing 401329, China 
700 1 |a Teng, Wenhao  |u Engineering Research Center of Mechanical Testing Technology and Equipment (Ministry of Education), Chongqing University of Technology , Chongqing 400054, China 
700 1 |a Chen, Jiaxing  |u Engineering Research Center of Mechanical Testing Technology and Equipment (Ministry of Education), Chongqing University of Technology , Chongqing 400054, China 
773 0 |t Journal of Physics: Conference Series  |g vol. 3019, no. 1 (May 2025), p. 012068 
786 0 |d ProQuest  |t Advanced Technologies & Aerospace Database 
856 4 1 |3 Citation/Abstract  |u https://www.proquest.com/docview/3216358113/abstract/embedded/160PP4OP4BJVV2EV?source=fedsrch 
856 4 0 |3 Full Text - PDF  |u https://www.proquest.com/docview/3216358113/fulltextPDF/embedded/160PP4OP4BJVV2EV?source=fedsrch