Design, Analysis, and Testing of a Novel 5-DOF Flexure-Based Alignment Stage
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| Pubblicato in: | Chinese Journal of Mechanical Engineering = Ji xie gong cheng xue bao vol. 38, no. 1 (Dec 2025), p. 172 |
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| Autore principale: | |
| Altri autori: | , , , , |
| Pubblicazione: |
Springer Nature B.V.
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| Accesso online: | Citation/Abstract Full Text Full Text - PDF |
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| 024 | 7 | |a 10.1186/s10033-025-01332-5 |2 doi | |
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| 045 | 2 | |b d20251201 |b d20251231 | |
| 100 | 1 | |a Yang, Shang |u Beihang University, School of Automation Science and Electrical Engineering, Beijing, China (GRID:grid.64939.31) (ISNI:0000 0000 9999 1211) | |
| 245 | 1 | |a Design, Analysis, and Testing of a Novel 5-DOF Flexure-Based Alignment Stage | |
| 260 | |b Springer Nature B.V. |c Dec 2025 | ||
| 513 | |a Journal Article | ||
| 520 | 3 | |a A high pattern resolution is critical for fabricating roll-to-roll printed electronics (R2RPE) products. For enhanced overlay alignment accuracy, position errors between the printer and the substrate web must be eliminated, particularly in inkjet printing applications. This paper proposes a novel five-degree-of-freedom (5-DOF) flexure-based alignment stage to adjust the posture of an inkjet printer head. The stage effectively compensates for positioning errors between the actuation mechanism and manipulated objects through a series–parallel combination of compliant substructures. Voice coil motors (VCMs) and linear motors serve as actuators to achieve the required motion. Theoretical models were established using a pseudo-rigid-body model (PRBM) methodology and were validated through finite element analysis (FEA). Finally, an alignment stage prototype was fabricated for an experiment. The prototype test results showed that the developed positioning platform attains 5-DOF motion capabilities with 335.1 µm × 418.9 µm × 408.1 µm × 3.4 mrad × 3.29 mrad, with cross-axis coupling errors below 0.11% along y- and z-axes. This paper proposes a novel 5-DOF flexure-based alignment stage that can be used for error compensation in R2RPE and effectively improves the interlayer alignment accuracy of multi-layer printing. | |
| 653 | |a Accuracy | ||
| 653 | |a Finite element method | ||
| 653 | |a Actuation | ||
| 653 | |a Alignment | ||
| 653 | |a Sliding friction | ||
| 653 | |a Prototype tests | ||
| 653 | |a Printers (data processing) | ||
| 653 | |a Interlayers | ||
| 653 | |a Substrates | ||
| 653 | |a Multilayers | ||
| 653 | |a Printers | ||
| 653 | |a Electric motors | ||
| 653 | |a Design | ||
| 653 | |a Offset printing | ||
| 653 | |a Registration | ||
| 653 | |a Screen printing | ||
| 653 | |a Ink jet printers | ||
| 653 | |a Degrees of freedom | ||
| 653 | |a Actuators | ||
| 653 | |a Inkjet printing | ||
| 653 | |a Error compensation | ||
| 653 | |a Position errors | ||
| 700 | 1 | |a Li, Yuxia |u Beihang University, School of Automation Science and Electrical Engineering, Beijing, China (GRID:grid.64939.31) (ISNI:0000 0000 9999 1211) | |
| 700 | 1 | |a Chen, Weihai |u Beihang University, School of Automation Science and Electrical Engineering, Beijing, China (GRID:grid.64939.31) (ISNI:0000 0000 9999 1211) | |
| 700 | 1 | |a Chen, Shasha |u Beihang University, School of Automation Science and Electrical Engineering, Beijing, China (GRID:grid.64939.31) (ISNI:0000 0000 9999 1211) | |
| 700 | 1 | |a Wang, Lei |u Beihang University, School of Automation Science and Electrical Engineering, Beijing, China (GRID:grid.64939.31) (ISNI:0000 0000 9999 1211) | |
| 700 | 1 | |a Sun, Xiantao |u Anhui University, School of Electrical Engineering and Automation, Hefei, China (GRID:grid.252245.6) (ISNI:0000 0001 0085 4987) | |
| 773 | 0 | |t Chinese Journal of Mechanical Engineering = Ji xie gong cheng xue bao |g vol. 38, no. 1 (Dec 2025), p. 172 | |
| 786 | 0 | |d ProQuest |t Engineering Database | |
| 856 | 4 | 1 | |3 Citation/Abstract |u https://www.proquest.com/docview/3248939060/abstract/embedded/6A8EOT78XXH2IG52?source=fedsrch |
| 856 | 4 | 0 | |3 Full Text |u https://www.proquest.com/docview/3248939060/fulltext/embedded/6A8EOT78XXH2IG52?source=fedsrch |
| 856 | 4 | 0 | |3 Full Text - PDF |u https://www.proquest.com/docview/3248939060/fulltextPDF/embedded/6A8EOT78XXH2IG52?source=fedsrch |