Style de citation APA (7e éd.)
Journal of vacuum science and technology. B, Nanotechnology & microelectronics: Materials, processing, measurement, & phenomena: JVST B. [J Vac Sci Technol B Nanotechnol Microelectron] NLMUID: 101585681.
Style de citation Chicago (17e éd.)
Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena: JVST B. [J Vac Sci Technol B Nanotechnol Microelectron] NLMUID: 101585681.
Style de citation MLA (9e éd.)
Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena: JVST B. [J Vac Sci Technol B Nanotechnol Microelectron] NLMUID: 101585681.
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