APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers. (2007). Journal of micro/nanolithography, MEMS, and MOEMS: JM3. SPIE-The International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers. Journal of Micro/nanolithography, MEMS, and MOEMS: JM3. Bellingham, WA: SPIE-The International Society for Optical Engineering, 2007.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers. Journal of Micro/nanolithography, MEMS, and MOEMS: JM3. SPIE-The International Society for Optical Engineering, 2007.