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Journal of micro/nanolithography, MEMS, and MOEMS JM3.

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Detalhes bibliográficos
Título anterior:	Journal of microlithography, microfabrication, and microsystems
Autor Corporativo:	Society of Photo-optical Instrumentation Engineers
Formato:	Recurso Electrónico Periódico
Idioma:	inglês
Publicado em:	Bellingham, WA : SPIE-The International Society for Optical Engineering, c2007-
Assuntos:	Microelectronics > Periodicals. Microlithography > Periodicals. Microfabrication > Periodicals. Microelectronics. Microfabrication. Microlithography. Periodicals.
Acesso em linha:	Available in Academic Search Ultimate. Ver en el OPAC
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Journal of Micro Nanolithography MEMS and MOEMS

Journal of micro/nanolithography, MEMS, and MOEMS: JM3 [J Micro Nanolithogr MEMS MOEMS] NLMUID: 101558516

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