Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode technology demonstrator CLICTD
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| Publicat a: | arXiv.org (Aug 30, 2022), p. n/a |
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| Autor principal: | |
| Altres autors: | , , , , , , , , , , , , , |
| Publicat: |
Cornell University Library, arXiv.org
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| Accés en línia: | Citation/Abstract Full text outside of ProQuest |
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|---|---|---|---|
| 001 | 2654737233 | ||
| 003 | UK-CbPIL | ||
| 022 | |a 2331-8422 | ||
| 024 | 7 | |a 10.1016/j.nima.2022.167413 |2 doi | |
| 035 | |a 2654737233 | ||
| 045 | 0 | |b d20220830 | |
| 100 | 1 | |a Dort, Katharina | |
| 245 | 1 | |a Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode technology demonstrator CLICTD | |
| 260 | |b Cornell University Library, arXiv.org |c Aug 30, 2022 | ||
| 513 | |a Working Paper | ||
| 520 | 3 | |a Small collection-electrode monolithic CMOS sensors profit from a high signal-to-noise ratio and a small power consumption, but have a limited active sensor volume due to the fabrication process based on thin high-resistivity epitaxial layers. In this paper, the active sensor depth is investigated in the monolithic small collection-electrode technology demonstrator CLICTD. Charged particle beams are used to study the charge-collection properties and the performance of devices with different thicknesses both for perpendicular and inclined particle incidence. In CMOS sensors with a high-resistivity Czochralski substrate, the depth of the sensitive volume is found to increase by a factor two in comparison with standard epitaxial material and leads to significant improvements in the hit-detection efficiency and the spatial and time resolution. | |
| 653 | |a Epitaxial layers | ||
| 653 | |a Electrodes | ||
| 653 | |a Substrates | ||
| 653 | |a Sensors | ||
| 653 | |a Technology demonstrator | ||
| 653 | |a Charged particles | ||
| 653 | |a Collection | ||
| 653 | |a CMOS | ||
| 653 | |a Particle beams | ||
| 653 | |a Electrical resistivity | ||
| 653 | |a Thin films | ||
| 653 | |a Power consumption | ||
| 653 | |a Thickness | ||
| 653 | |a Signal to noise ratio | ||
| 700 | 1 | |a Ballabriga, Rafael | |
| 700 | 1 | |a Braach, Justus | |
| 700 | 1 | |a Buschmann, Eric | |
| 700 | 1 | |a Campbell, Michael | |
| 700 | 1 | |a Dannheim, Dominik | |
| 700 | 1 | |a Huth, Lennart | |
| 700 | 1 | |a Kremastiotis, Iraklis | |
| 700 | 1 | |a Kröger, Jens | |
| 700 | 1 | |a Linssen, Lucie | |
| 700 | 1 | |a Munker, Magdalena | |
| 700 | 1 | |a Snoeys, Walter | |
| 700 | 1 | |a Spannagel, Simon | |
| 700 | 1 | |a Švihra, Peter | |
| 700 | 1 | |a Vanat, Tomas | |
| 773 | 0 | |t arXiv.org |g (Aug 30, 2022), p. n/a | |
| 786 | 0 | |d ProQuest |t Engineering Database | |
| 856 | 4 | 1 | |3 Citation/Abstract |u https://www.proquest.com/docview/2654737233/abstract/embedded/75I98GEZK8WCJMPQ?source=fedsrch |
| 856 | 4 | 0 | |3 Full text outside of ProQuest |u http://arxiv.org/abs/2204.10569 |