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Waterproofing a Thermally Actuated Vibrational MEMS Viscosity Sensor

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Pubblicato in:Actuators vol. 13, no. 2 (2024), p. 57
Autore principale: Gan, Luis
Altri autori: Choudhary, Shreyas, Reddy, Kavana, Levine, Connor, Jander, Lukas, Uchil, Amogh, Puchades, Ivan
Pubblicazione:
MDPI AG
Soggetti:
United States > US
Silicon
Microelectromechanical systems
Polymers
Actuation
Sensors
Electric contacts
Aluminum
Diaphragms (mechanics)
Fluids
Drinking water
Viscosity
Thin films
Vibration response
Glycerol
Glycerol-Water
Rheology
Waterproofing
Chemical vapor deposition
Actuators
Strain
Cellulose esters
Cellulose nitrate
Accesso online:Citation/Abstract
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