Waterproofing a Thermally Actuated Vibrational MEMS Viscosity Sensor

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Detalhes bibliográficos
Publicado no:	Actuators vol. 13, no. 2 (2024), p. 57
Autor principal:	Gan, Luis
Outros Autores:	Choudhary, Shreyas, Reddy, Kavana, Levine, Connor, Jander, Lukas, Uchil, Amogh, Puchades, Ivan
Publicado em:	MDPI AG
Assuntos:	United States > US Silicon Microelectromechanical systems Polymers Actuation Sensors Electric contacts Aluminum Diaphragms (mechanics) Fluids Drinking water Viscosity Thin films Vibration response Glycerol Glycerol-Water Rheology Waterproofing Chemical vapor deposition Actuators Strain Cellulose esters Cellulose nitrate
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