Microlithography world
I tiakina i:
| Kaituhi rangatōpū: | |
|---|---|
| Hōputu: | Tāhiko Hautaka |
| Reo: | Ingarihi |
| I whakaputaina: |
Port Washington, N.Y. :
Penn Well Publication, published in cooperation with SPIE,
[1992]-2008.
|
| Ngā marau: | |
| Urunga tuihono: | Available in Academic Search Ultimate. Ver en el OPAC |
| Ngā Tūtohu: |
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
|
MARC
| LEADER | 00000cas a22000002a 4500 | ||
|---|---|---|---|
| 001 | ebs576775e | ||
| 003 | EBZ | ||
| 006 | m d |||||| | ||
| 007 | cr|unu|||||||| | ||
| 008 | 931011d19922008okuqr p o 0 a0eng c | ||
| 022 | |y 1074-407X | ||
| 035 | |a (EBZ)ebs576775e | ||
| 040 | |a IXA |b eng |d EBZ | ||
| 042 | |a pcc nsdp | ||
| 050 | 0 | 0 | |a TK7871.85 |b .M519 |
| 130 | 0 | |a Microlithography world (Online) | |
| 222 | 1 | 0 | |a Microlithography world |
| 245 | 0 | 0 | |a Microlithography world |h [electronic resource]. |
| 260 | |a Port Washington, N.Y. : |b Penn Well Publication, published in cooperation with SPIE, |c [1992]-2008. | ||
| 310 | |a Quarterly, |b Jan./Feb./Mar. 1993- | ||
| 362 | 0 | |a Vol. 1, no. 1 (Mar./Apr. 1992)- | |
| 362 | 1 | |a Ceased with v. 17, no. 4 (Nov. 2008). | |
| 500 | |a Title from cover. | ||
| 500 | |a Published: Tulsa, OK, Oct., Nov., Dec. 1993- | ||
| 650 | 0 | |a Semiconductors |x Design and construction |v Periodicals. | |
| 650 | 0 | |a Microlithography |v Periodicals. | |
| 650 | 0 | |a Masks (Electronics) |v Periodicals. | |
| 650 | 7 | |a Masks (Electronics) |2 fast |0 (OCoLC)fst01011095 | |
| 650 | 7 | |a Microlithography. |2 fast |0 (OCoLC)fst01019883 | |
| 650 | 7 | |a Semiconductors |x Design and construction. |2 fast |0 (OCoLC)fst01112213 | |
| 650 | 1 | 7 | |a Microlithografie. |2 gtt |
| 655 | 0 | |a Electronic journals. | |
| 655 | 7 | |a Periodicals. |2 fast |0 (OCoLC)fst01411641 | |
| 655 | 7 | |a Periodicals. |2 lcgft | |
| 710 | 2 | |a Society of Photo-Optical Instrumentation Engineers. |1 https://id.oclc.org/worldcat/entity/E39QH7JmqhwYgDHX493QW4Gb9t | |
| 773 | 0 | |t Academic Search Ultimate |d EBSCO | |
| 776 | 1 | |t Microlithography world |x 1074-407X |w (OCoLC)28982886 |w (DLC)93659127 | |
| 856 | 4 | 0 | |3 Full text available: May 2003-Nov 2008. |z Available in Academic Search Ultimate. |u https://biblioteca.ues.edu.sv/acceso/ebsco/?url=https%3A%2F%2Fsearch.ebscohost.com%2Fdirect.asp%3Fdb%3Dasn%26jid%3D9CK%26scope%3Dsite |
| 901 | |a Trade Publication | ||