Design, Analysis, and Testing of a Novel 5-DOF Flexure-Based Alignment Stage

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Bibliographic Details
Published in:Chinese Journal of Mechanical Engineering = Ji xie gong cheng xue bao vol. 38, no. 1 (Dec 2025), p. 172
Main Author: Yang, Shang
Other Authors: Li, Yuxia, Chen, Weihai, Chen, Shasha, Wang, Lei, Sun, Xiantao
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Springer Nature B.V.
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