Lithography : main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...
Guardado en:
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| Format: | Electronisk eBog |
| Sprog: | engelsk |
| Udgivet: |
London :
ISTE ;
2011.
Hoboken, N.J. : Wiley, 2011. |
| Fag: | |
| Online adgang: | https://biblioteca.ues.edu.sv/acceso/elibro/?url=https%3A%2F%2Felibro.net%2Fereader%2Fbiblioues/187580 Ver en el OPAC |
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