Lithography : main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...
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| Formato: | Electrónico eBook |
| Lenguaje: | inglés |
| Publicado: |
London :
ISTE ;
2011.
Hoboken, N.J. : Wiley, 2011. |
| Materias: | |
| Acceso en línea: | https://biblioteca.ues.edu.sv/acceso/elibro/?url=https%3A%2F%2Felibro.net%2Fereader%2Fbiblioues/187580 Ver en el OPAC |
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| Sumario: | "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
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| Notas: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
| Descripción Física: | xxv, 377 p. : ill. (some col.) |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9781118621233 |