Lithography : main techniques /

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...

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Bibliografiske detaljer

Andre forfattere:	Landis, Stefan
Format:	Electronisk eBog
Sprog:	engelsk
Udgivet:	London : ISTE ; 2011. Hoboken, N.J. : Wiley, 2011.
Fag:	Microlithography. Electronic books.
Online adgang:	https://biblioteca.ues.edu.sv/acceso/elibro/?url=https%3A%2F%2Felibro.net%2Fereader%2Fbiblioues/187580 Ver en el OPAC
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