Journal of micro/nanolithography, MEMS, and MOEMS JM3.
Enregistré dans:
| Titre précédent: | Journal of microlithography, microfabrication, and microsystems |
|---|---|
| Collectivité auteur: | |
| Format: | Électronique Revue |
| Langue: | anglais |
| Publié: |
Bellingham, WA :
SPIE-The International Society for Optical Engineering,
c2007-
|
| Sujets: | |
| Accès en ligne: | Available in Academic Search Ultimate. Voir à l'OPAC |
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MARC
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| 130 | 0 | |a Journal of micro/nanolithography, MEMS, and MOEMS (Online) | |
| 222 | 1 | 0 | |a Journal of micro/nanolithography, MEMS, and MOEMS |
| 245 | 0 | 0 | |a Journal of micro/nanolithography, MEMS, and MOEMS |h [electronic resource] : |b JM3. |
| 246 | 3 | 0 | |a JM3 |
| 260 | |a Bellingham, WA : |b SPIE-The International Society for Optical Engineering, |c c2007- | ||
| 310 | |a Quarterly | ||
| 362 | 0 | |a Vol. 6, no. 1 (Jan.-Mar. 2007)- | |
| 500 | |a Title from cover. | ||
| 650 | 0 | |a Microelectronics |v Periodicals. | |
| 650 | 0 | |a Microlithography |v Periodicals. | |
| 650 | 0 | |a Microfabrication |v Periodicals. | |
| 650 | 7 | |a Microelectronics. |2 fast |0 (OCoLC)fst01019757 | |
| 650 | 7 | |a Microfabrication. |2 fast |0 (OCoLC)fst01019807 | |
| 650 | 7 | |a Microlithography. |2 fast |0 (OCoLC)fst01019883 | |
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| 776 | 0 | 8 | |i Online version: |t Journal of micro/nanolithography, MEMS, and MOEMS |w (OCoLC)768274193 |
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