Fundamental principles of optical lithography : the science of microfabrication /

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書誌詳細
第一著者:	Mack, Chris A.
フォーマット:	電子媒体 eBook
言語:	英語
出版事項:	Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, [2007]
主題:	Integrated circuits > Design and construction. Microlithography > Industrial applications. Electronic books.
オンライン･アクセス:	https://biblioteca.ues.edu.sv/acceso/elibro/?url=https%3A%2F%2Felibro.net%2Fereader%2Fbiblioues/179828 OPACで表示
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MARC


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100	1		\|a Mack, Chris A.
245	1	0	\|a Fundamental principles of optical lithography : \|b the science of microfabrication / \|c Chris Mack.
264		1	\|a Chichester, West Sussex, England ; \|a Hoboken, NJ, USA : \|b Wiley, \|c [2007]
264		4	\|c Ã2007
300			\|a xvii, 515 p. : \|b ill.
336			\|a text \|b txt \|2 rdacontent
337			\|a computer \|b c \|2 rdamedia
338			\|a online resource \|b cr \|2 rdacarrier
347			\|a data file \|2 rda
504			\|a Includes bibliographical references and index.
588			\|a Description based on metadata supplied by the publisher and other sources.
590			\|a Electronic resource. Santa Fe, Argentina: elibro, 2025. Available via the World Wide Web. Access may be limited to libraries affiliated with elibro.
650		0	\|a Integrated circuits \|x Design and construction.
650		0	\|a Microlithography \|x Industrial applications.
655		4	\|a Electronic books.
797	2		\|a elibro, Corp.
856	4	0	\|u https://biblioteca.ues.edu.sv/acceso/elibro/?url=https%3A%2F%2Felibro.net%2Fereader%2Fbiblioues/179828